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Current status of ASET-HIT EUV phase-shifting point diffraction interferometer

Author(s):
Gomel,Y. ( Association of Super-Advanced Electronics Tecnology )
Sugisaki,K.
Zhu,Y.
Niibe,M.
Watanabe,T.
Kinoshita,H.
1 more
Publication title:
Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4506
Pub. Year:
2001
Page(from):
39
Page(to):
45
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442208 [0819442208]
Language:
English
Call no.:
P63600/4506
Type:
Conference Proceedings

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