Debris-free soft x-ray source with gas-puff target
- Author(s):
Ni,Q. ( Changchun Institute of Optics, Fine Mechanics, and Physics ) Chen,B. Gong,Y. Cao,J. Lin,J. Lee,H. - Publication title:
- Advances in laboratory-based X-ray sources and optics II : 30 July-1 August 2001, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4502
- Pub. Year:
- 2001
- Page(from):
- 96
- Page(to):
- 99
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442161 [081944216X]
- Language:
- English
- Call no.:
- P63600/4502
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Compact and debris-free laser plasma soft x-ray source based on a gas puff target [5918-18]
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Investigation of soft- x-ray emission in the water window for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System …
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Characterization and optimization of a laser-produced x-ray source with a gas puff target
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Wide band laser-plasma soft x-ray source using a gas puff target for direct photo-etching of polymers [5958-44]
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Spectral measurement of soft x-ray and EUV emissions from a laser-irradiated gas puff target using a transmission grating spectrometer
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |