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Dual-fiber optic microcantilever proximity sensor

Author(s):
Publication title:
Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4468
Pub. Year:
2001
Page(from):
161
Page(to):
170
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441829 [0819441821]
Language:
English
Call no.:
P63600/4468
Type:
Conference Proceedings

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