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Ion beam nanosmoothing of sapphire and silicon carbide surfaces

Author(s):
Fenner,D.B. ( Epion Corp. )
DiFilippo,V.
Bennett,J.A.
Tetreault,T.G.
Hirvonen,J.K.
Feldman,L.C.
1 more
Publication title:
Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4468
Pub. Year:
2001
Page(from):
17
Page(to):
24
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441829 [0819441821]
Language:
English
Call no.:
P63600/4468
Type:
Conference Proceedings

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