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Silicon carbon nitride films as new materials obtained by plasma chemical vapor deposition from novel precursor

Author(s):
Smirnova,T.P. ( Institute of Inorganic Chemistry )
Shmakov,A.N.
Badalian,A.M.
Kaichev,V.V.
Bukhtiyarov,V.I.
Rachlin,V.I.
Fomina,A.N.
2 more
Publication title:
Complex mediums II : beyond linear isotropic dielectrics, 30 July-1 August, 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4467
Pub. Year:
2001
Page(from):
366
Page(to):
376
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441812 [0819441813]
Language:
English
Call no.:
P63600/4467
Type:
Conference Proceedings

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