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Scanning electron and atomic force microscopy measurements of ion beam etched InP samples using Ar/H2 chemistry

Author(s):
Publication title:
Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4451
Pub. Year:
2001
Page(from):
306
Page(to):
312
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441652 [0819441651]
Language:
English
Call no.:
P63600/4451
Type:
Conference Proceedings

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