Fabrication of integrated diffractive micro-optics for MEMS applications
- Author(s):
Senesac,L.R. ( Univ. of Tennessee ) Farahi,R.H. Corbeil,J.L. Earl,D.D. Rajic,S. Datskos,P.G. - Publication title:
- Optical manufacturing and testing IV : 31 July-2 August 2001, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4451
- Pub. Year:
- 2001
- Page(from):
- 295
- Page(to):
- 305
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441652 [0819441651]
- Language:
- English
- Call no.:
- P63600/4451
- Type:
- Conference Proceedings
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