Polarized light scattering from metallic particles on silicon wafers
- Author(s):
- Kim,J.H. ( National Institute of Standards and Technology )
- Ehrman,S.H.
- Mulholland,G.W.
- Germer,T.A.
- Publication title:
- Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4449
- Pub. Year:
- 2001
- Page(from):
- 281
- Page(to):
- 290
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441638 [0819441635]
- Language:
- English
- Call no.:
- P63600/4449
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
5
Conference Proceedings
Polarized light-scattering measurements of polished and etched steel surfaces
SPIE - The International Society for Optical Engineering |
11
Conference Proceedings
Light Scattering from Liquid-Air Interface Deformed by Optical Force of a Totally Reflected Gaussian Beam,
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Characterizing surface roughness of thin films by polarized light scattering
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Recovery of Silicon and Silicon Carbide Powder from Waste Silicon Wafer Sludge
Trans Tech Publications |