Blank Cover Image

Use of light scatter signals to identify particle material

Author(s):
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4449
Pub. Year:
2001
Page(from):
131
Page(to):
139
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441638 [0819441635]
Language:
English
Call no.:
P63600/4449
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Effects of particle shape on particle identification and scatter predictions

Ivakhnenko,V.I., Stover,J.C., Scheer,C.A., Eremin,Y.A.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Numerical Simulation of Monochromatic Light Scattering on Stratified Surfaces

Malyugin,V.I., Litvak,M.Ya.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Modeled and measured scatter from vias

Stover,J.C., Scheer,C.A., Ivakhnenko,V.I., Eremin,Yu., Grishina,N.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings MICROPROBE ANALYSIS OF NANOPHASE METAL-OXIDES USING INELASTIC LIGHT SCATTERING

Parker, J.C., Siegel, R.W.

Materials Research Society
3 Conference Proceedings Comparison of models and measurements of scatter from surface-bound particles

Scheer,C.A., Stover,J.C., Ivakhnenko,V.I.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Spectral Correlations in White Light Scattering by Non-Gaussian Rough Surfaces,

Litvak,M.Ya., Malyugin,V.I.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Modeling of scatter from small pits of arbitrary shape

Ivakhnenko,V.I., Scheer,C.A., Stover,J.C.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Roughness measurement of dielectrics with light scatter

M.L. Bernt, J.C. Stover

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Comparison of surface PSOs calculated from both AFM profiles and scatter data

Stover,J.C., Ivakhnenko,V.I., Scheer,C.A.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Accurate sizing of deposited PSL spheres from light scatter measurements

Stover,J.C., Scheer,C.A.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Compression of EEG multichannel signal using wavelets

Ponomaryov, V.I., Badillo, L., Juarez, C., Sanchez, J.L., Igartua, L., Sanchez, J.C.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Using Supercritical Water Manipulates the Structures of Porous Materials and Nano-scale Particles

Li, J.C., Aswani, R., Gao, X.L., King, S., Kolesnikov, A.I.

Kluwer Academic Publishers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12