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Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool

Author(s):
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4449
Pub. Year:
2001
Page(from):
79
Page(to):
89
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441638 [0819441635]
Language:
English
Call no.:
P63600/4449
Type:
Conference Proceedings

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