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IR spectroscopic ellipsometry for industrial characterization of semiconductors

Author(s):
Boher,P. ( SOPRA S.A. )
Bucchia,M.
Piel,J.P.
Defranoux,C.
Stehle,J.L.
Pickering,C.
1 more
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4449
Pub. Year:
2001
Page(from):
69
Page(to):
78
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441638 [0819441635]
Language:
English
Call no.:
P63600/4449
Type:
Conference Proceedings

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