Measurement of total integrated scatter of optical coatings for 157-nm lithography

Measurement of total integrated scatter of optical coatings for 157-nm lithography

Author(s):

Saito,T. ( Association of Super-Advanced Electronics Technologies )

Publication title:

Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4449

Pub. Year:

2001

Page(from):

22

Page(to):

29

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441638 [0819441635]

Language:

English

Call no.:

P63600/4449

Type:

Conference Proceedings

Details

TDL ID:	ZA00012163
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Optical metrology roadmap for the semiconductor, optical, and data storage industries
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2001.08.02-2001.08.03

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