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Optical characterization of MEMS deformable mirror array structures

Author(s):
Publication title:
Surface scattering and diffraction for advanced metrology : 1 August 2001 San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4447
Pub. Year:
2001
Page(from):
65
Page(to):
76
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441614 [0819441619]
Language:
English
Call no.:
P63600/4447
Type:
Conference Proceedings

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