Surface cleaning mechanisms utilizing VUV radiation in oxygen-containing gaseous environments
- Author(s):
- Falkenstein,Z. ( USHIO America, Inc. )
- Publication title:
- Lithographic and Micromachining Techniques for Optical Component Fabrication
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4440
- Pub. Year:
- 2001
- Page(from):
- 246
- Page(to):
- 255
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441546 [0819441546]
- Language:
- English
- Call no.:
- P63600/4440
- Type:
- Conference Proceedings
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