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Farbrication of diffractive optical elements on a Si chip by an imprint lithography using nonsymmetrical silicon mold

Author(s):
Hirai,Y. ( Osaka Prefecture Univ. )
Okano,M.
Okuno,T.
Toyota,H.
Yotsuya,T.
Kikuta,H.
Tanaka,Y.
2 more
Publication title:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4440
Pub. Year:
2001
Page(from):
228
Page(to):
237
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441546 [0819441546]
Language:
English
Call no.:
P63600/4440
Type:
Conference Proceedings

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