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Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstrom assessment of spatial coherence

Author(s):
Parriaux,O.M. ( Univ. Jean Monnet de St.-Etienne )
Jourlin,Y.
Pigeon,F.
Bouchet,G.
Dijk,P.W.Van
Pellens,R.J.
Topcu,S.
Alayli,Y.
Bonis,M.
4 more
Publication title:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4440
Pub. Year:
2001
Page(from):
209
Page(to):
216
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441546 [0819441546]
Language:
English
Call no.:
P63600/4440
Type:
Conference Proceedings

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