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Fabrication of gray-scale masks and diffractive optical elements with LDW glass

Author(s):
Korolkov,V.P. ( Institute of Automation and Electrometry )
Malyshev,A.I.
Poleshchuk,A.G.
Cherkashin,V.V.
Tiziani,H.J.
PruB,C.
Schoder,T.
Westhauser,J.
Wu,C.
4 more
Publication title:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4440
Pub. Year:
2001
Page(from):
73
Page(to):
84
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441546 [0819441546]
Language:
English
Call no.:
P63600/4440
Type:
Conference Proceedings

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