Bridge structure PZT thin film microtransducer with mass loading

Bridge structure PZT thin film microtransducer with mass loading

Author(s):

Zang,M. ( Univ. of Minnesota/Twin Cities )
Zurn,S.M.
Robbins,W.P.
Polla,D.L.
Markus,D.T.

Publication title:

Wave optics and VLSI photonic devices for information processing : 2-3 August 2001 San Diego, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4435

Pub. Year:

2001

Page(from):

152

Page(to):

161

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441492 [081944149X]

Language:

English

Call no.:

P63600/4435

Type:

Conference Proceedings

Details

TDL ID:	ZA00012149
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Wave optics and VLSI photonic devices for information processing
Conf. info. (Number):	2001
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2001.08.02-2001.08.03

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