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Highly reliable high-power 266-nm all-solid-state UV laser

Author(s):
Kojima,T. ( Mitsubishi Electric Corp. )
Konno,S.
Fujikwaw,S.
Seguchi,M.
Takenaka,Y.
Yasui,K.
Kamimura,T.
Yoshimura,M.
Mori,Y.
Sasaki,T.
Tanaka,M.
Okada,Y.
7 more
Publication title:
Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4426
Pub. Year:
2001
Page(from):
468
Page(to):
471
Pages:
4
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441379 [0819441376]
Language:
English
Call no.:
P63600/4426
Type:
Conference Proceedings

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