Dynamic particle removal by nanosecond dry laser cleaning: theory
- Author(s):
Arnold,N. ( Johannes-Kepler-Univ. ) Schrems,G. Muhlberger,T. Bertsch,M. Mosbacher,M. Leiderer,P. Bauerle,D. - Publication title:
- Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4426
- Pub. Year:
- 2001
- Page(from):
- 340
- Page(to):
- 346
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441379 [0819441376]
- Language:
- English
- Call no.:
- P63600/4426
- Type:
- Conference Proceedings
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