Film growth on single MgO and SiO2 covered Si substrate by pulsed laser deposition

Film growth on single MgO and SiO2 covered Si substrate by pulsed laser deposition

Author(s):

Su,Y. ( National Univ. of Singapore )

Publication title:

Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4426

Pub. Year:

2001

Page(from):

248

Page(to):

251

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441379 [0819441376]

Language:

English

Call no.:

P63600/4426

Type:

Conference Proceedings

Details

TDL ID:	ZA00012140
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2000 : 2nd
Conf. info. (Venue):	Singapore
Conf. info. (Date):	2001.05.16-2001.05.18

Similar Items:

1 Conference Proceedings Growth of (001)-oriented PZT thin films on amorphous SiO2 by pulsed laser deposition Zhao,J., Lu,L., Thompson,C.V., Lu,Y.F., Song,W.D. SPIE-The International Society for Optical Engineering	7 Conference Proceedings KrF excimer laser deposition of titanium thin films on silicon substrates Lu,L.W., Lu,Y.F., Hong,H., Ho,T.M., Low,T.S. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Influence Of Substrate Temperature On Barium Ferrite Films Prepared By Laser Deposition Song, W.D., Lu, Y.F., Wang, W.J., Chong, T.C. Materials Research Society	8 Conference Proceedings Nanostructure Fabrication Using Pulsed Lasers and Near-field Optical Properties of Sub-micron Particles Zhang, L., Lu, Y.F., Song, W.D., Zheng, Y.W., Luk'yanchuk, B.S. Materials Research Society
3 Conference Proceedings Characterization of modified surface of indium tin oxide film during process of laser patterning Zeng,J.N., Koh,H.L., Ren,Z.M., Song,W.D., Lu,Y.F. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Cleaning force in laser cleaning of silicon substrates Song,W.D., Lu,Y.F., Ye,K.D., Tee,C.K., Hong,M.H., Liu,D.M., Low,T.S. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Epitaxial growth of atomically smooth (111)-oriented MgO films on Si (111) substrate by pulsed laser deposition Chen, T. L., Li, X. M., Zhang, X., Yu, W. D., Gao, X. D. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Pulsed-Laser deposition of AIN thin films Lu,Y.F., Ren,Z.M., Ni,H.Q., Goh,Y.W., Cheong,B.A., Chow,S.K., Wang,J.P., Chong,T.C. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Pulsed Laser Deposition of High Coercivity Barium Ferrite Films Song, W. D., Lu, Y. F., Wang, J. P., Zeng, X. T., Lu, L., Low, T. S. MRS - Materials Research Society	11 Conference Proceedings Laser cleaning technology and its application Song,W.D., Hong,M.H., Zhang,L., Lu,Y.F., Chong,T.C. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Preparation of superconducting YBa2Cu3O7-x films on metallic substrates by pulsed-laser deposition Wang,Y., Su,B., Huang,X., Wang,Q.L., An,C.W., Fan,Y.C., Lu,D.S. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Kinetic study of nanofabrication on gold films by atomic force microscope tips under laser radiation Hu,B., Lu,Y.F., Mai,Z.H., Song,W.D., Chim,W.K. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12