Six-beam high-power KrF excimer laser system with energy of 100 J/23 ns
- Author(s):
Shan,Y. ( China Institute of Atomic Energy ) Wang,N. Ma,W. Yang,D. Wang,X. Ma,J. Jang,X. Gong,K. Gao,H. Tang,X. Tao,Y. - Publication title:
- ECLIM 2000 : 26th European Conference on Laser Interaction with Matter, 12-16 June, 2000, Prague, Czech Republic
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4424
- Pub. Year:
- 2000
- Page(from):
- 104
- Page(to):
- 107
- Pages:
- 4
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441317 [0819441317]
- Language:
- English
- Call no.:
- P63600/4424
- Type:
- Conference Proceedings
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