In-situ single-wavelength ellipsometer for a vacuum chamber

In-situ single-wavelength ellipsometer for a vacuum chamber

Author(s):

Chegal,W. ( Korea Advanced Institute of Science and Technology )

Publication title:

Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4416

Pub. Year:

2001

Page(from):

15

Page(to):

18

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441218 [081944121X]

Language:

English

Call no.:

P63600/4416

Type:

Conference Proceedings

Details

TDL ID:	ZA00012131
Series ID:	PA00000029
Conf. info. (Name):	Optical Engineering for Sensing and Nanotechnology : ICOSN
Conf. info. (Number):	2001
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2001.06.06-2001.06.08

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