Stress relaxation of the micromachined coplanar waveguide
- Author(s):
- Publication title:
- International Conference on Sensor Technology (ISTC 2001)
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4414
- Pub. Year:
- 2001
- Page(from):
- 231
- Page(to):
- 234
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441195 [0819441198]
- Language:
- English
- Call no.:
- P63600/4414
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
IMAPS |
2
Conference Proceedings
Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Effective dielectric-constant measurement for micromachined transmission line with multiline method
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
ESA Publications Division |
10
Conference Proceedings
Finite Width Coplanar Waveguide for Microwave and Millimeter-Wave Integrated Circuits
SPIE-The International Society for Optical Engineering |
ESA Publications Division |
11
Conference Proceedings
Application of porous Si micromachining technology in the calorimetric sensor
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Measuring the Young’s Relaxation Modulus of PDMS Using Stress Relaxation Nanoindentation
Materials Research Society |
SPIE-The International Society for Optical Engineering |