Replication of refractive micro-optomechanical components made with deep lithography with protons

Replication of refractive micro-optomechanical components made with deep lithography with protons

Author(s):

Tuteleers,P. ( Vrije Univ. Brussel )

Publication title:

Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4408

Pub. Year:

2001

Page(from):

329

Page(to):

337

Pages:

9

Pub. info.:

Bellingham, Washington: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819441096 [0819441090]

Language:

English

Call no.:

P63600/4408

Type:

Conference Proceedings

Details

TDL ID:	ZA00012124
Series ID:	PA00000029
Conf. info. (Name):	Design, Test, Integration, and Packaging of MEMS/MOEMS
Conf. info. (Number):	2001
Conf. info. (Venue):	Cannes, France
Conf. info. (Date):	2001.04.25-2001.04.27

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