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Electromechanical analysis of microelectromechanical structures and dynamic simulations of laterally vibratory microgyroscope

Author(s):
Publication title:
MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4407
Pub. Year:
2001
Page(from):
68
Page(to):
77
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441089 [0819441082]
Language:
English
Call no.:
P63600/4407
Type:
Conference Proceedings

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