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In-line failure analysis on productive wafers with dual-beam SEM/FIB systems

Author(s):
Weiland,R. ( Infineon Technologies AG )
Boit,C.
Dawes,N.
Dziesiaty,A.
Demm,E.
Ebersberger,B.
Frey,L.
Geyer,S.
Hirsch,A.
Lehrer,C.
Meis,P.
Kamolz,M.
Lezec,H.
Rettenmaier,H.
Tittes,W.
Treichler,R.
Zimmermann,H.
12 more
Publication title:
In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4406
Pub. Year:
2001
Page(from):
21
Page(to):
30
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441072 [0819441074]
Language:
English
Call no.:
P63600/4406
Type:
Conference Proceedings

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