Fabrication of fluidic manifold systems using single-exposure grayscale masks
- Author(s):
- Hayden,C.J. ( Univ. of Wales Bangor )
- Burt,J.P.H.
- Publication title:
- Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4404
- Pub. Year:
- 2001
- Page(from):
- 231
- Page(to):
- 237
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819441058 [0819441058]
- Language:
- English
- Call no.:
- P63600/4404
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Excimer laser micromachining system for the production of bioparticle electromanipulation devices
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Fabrication of single/double crown-shaped capacitors on DRAM cell using phase-shift mask technology
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Microfabrication of biofactory-on-a-chip devices using laser ablation technology
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Bimetallic thermal resists potential for double-exposure immersion lithography and grayscale photomasks
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Fabrication of Photo-Polymerized PCL Tissue Engineering Scaffolds by Dynamic Masking Rapid Prototyping System
Trans Tech Publications |
12
Conference Proceedings
System for modification of exposure time in fiber Bragg gratings fabrication with using scanning phase mask method
SPIE - The International Society of Optical Engineering |