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Optical measurement methods to study dynamic behavior in MEMS

Author(s):
Publication title:
Microsystems Engineering: Metrology and Inspection
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4400
Pub. Year:
2001
Page(from):
127
Page(to):
137
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440952 [0819440957]
Language:
English
Call no.:
P63600/4400
Type:
Conference Proceedings

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