Inspection system for MEMS characterization on wafer level using ESPI

Inspection system for MEMS characterization on wafer level using ESPI

Author(s):

Aswendt,P. ( Fraunhofer-Institut fur Werkzeugmaschinen und Umformtechnik )
Schmidt,C.-D.
Zielke,D.
Schubert,S.

Publication title:

Microsystems Engineering: Metrology and Inspection

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4400

Pub. Year:

2001

Page(from):

43

Page(to):

50

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819440952 [0819440957]

Language:

English

Call no.:

P63600/4400

Type:

Conference Proceedings

Details

TDL ID:	ZA00012116
Series ID:	PA00000029
Conf. info. (Name):	Lasers in Metrology and Art Conservation : Microsystems engineering
Conf. info. (Number):	2001
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2001.06.20-2001.06.21

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