Noncontact laser speckle sensor for measuring one- and two-dimensional angular displacement
- Author(s):
- Ulieru,D.Gh. ( ROMES S.A. )
- Publication title:
- Optical measurement systems for industrial inspection II : application in industrial design : 18-19 June 2001 Munch, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4398
- Pub. Year:
- 2001
- Page(from):
- 289
- Page(to):
- 295
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440938 [0819440930]
- Language:
- English
- Call no.:
- P63600/4398
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Application of fiber optic sensors to wastewater management using microelectronics fabrication processes
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
New contributions to automated processing using different photoresists for microelectronics fabrication
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Laser diode applications for contamination control in microelectronics fabrication processes
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Modern concept of focused ion beam techniques for reliability analysis in VLSI manufacturing
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Comparative analysis of silicon wafers micromachining versus nonconventional technology
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Laser diodes applications for contamination control in microelectronics fabrication processes
SPIE |
4
Conference Proceedings
In-line monitoring of process-induced damage through chemical contamination in microelectronic manufacturing
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Optoelectronic sensor of two-dimensional angular displacements:idea and preliminary test results
SPIE-The International Society for Optical Engineering |