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Absolute optical path difference measurement with angstrom accuracy over ranges of millimeters

Author(s):
Publication title:
Optical measurement systems for industrial inspection II : application in industrial design : 18-19 June 2001 Munch, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4398
Pub. Year:
2001
Page(from):
116
Page(to):
126
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440938 [0819440930]
Language:
English
Call no.:
P63600/4398
Type:
Conference Proceedings

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