Polishing of InSb in K2Cr2O7-HBr-HCI (oxalic acid) solutions
- Author(s):
- Tomashik,V.N. ( Institute of Semiconductor Physics )
- Kusiak,N.V.
- Tomashik,Z.F.
- Danylenko,S.G.
- Publication title:
- Fifth international conference on material science and material properties for infrared optoelectronics : 22-24 may 2000, Kiev, Ukraine
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4355
- Pub. Year:
- 2000
- Page(from):
- 294
- Page(to):
- 298
- Pages:
- 5
- Pub. info.:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440648 [0819440649]
- Language:
- English
- Call no.:
- P63600/4355
- Type:
- Conference Proceedings
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