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"Establishment of production processes and assurance method for alternating phase-shift masks (Best Poster Paper, BACUS 2000 Symposium)"

Author(s):
Murai,S.M. ( Dai Nippon Printing Co., Ltd. )
Koizumi,Y.
Kamibayashi,T.
Saitou,H.
Hoga,M.
Morikawa,Y.
Miyashita,H.
2 more
Publication title:
17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4349
Pub. Year:
2000
Page(from):
60
Page(to):
72
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440396 [0819440396]
Language:
English
Call no.:
P63600/4349
Type:
Conference Proceedings

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