Blank Cover Image

Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling

Author(s):
Borovkov,A.I. ( St. Petersburg State Technical Univ. )
Pyatishev,E.N.
Lurie,M.S.
Pereyaslavets,E.V.
Lunev,V.P.
Kazakin,A.N.
Popova,I.V.
Lestiev,A.M.
3 more
Publication title:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4348
Pub. Year:
2000
Page(from):
361
Page(to):
368
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440372 [081944037X]
Language:
English
Call no.:
P63600/4348
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings 3D finite element modeling of micromachined pressure sensor

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Akulshin,Y.D., Pereyaslavets,E.V.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings New approach to mathematical and finite element modeling of delaminations in multidirectional multilayered laminated composite structures:I. Fracture criteria …

Borovkov,A.I., Misnik,Yu.Y.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings 3D finite element modeling of micromachined catheter with corrugated diaphragm

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Akulshin,Y.D., Pereyaslavets,E.V.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings New approach to mathematical and finite element modeling of delaminations in multidirectional multilayered composite structures:?.Numerical examples

Borovkov,A.I., Misnik,Yu.Y.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings 3D finite element modeling of the micromachined microphone with corrugated diaphragm

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Korshunov,A.V., Akulshin,Y.D., Sabadash,V.O., Smolnikov,B.A.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Finite element stress,vibration,and buckling analysis of laminated beams with the use of refined elements

Borovkov,A.I., Avdeev,I., Artemyev,A.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings "Micronozzles: 3D numerical structural and gas dynamics modeling, fabrication, and preliminary experimental results"

Borovkov,A.I., Pyatishev,E.N., Lurie,M.S., Korshunov,A.V., Akulshin,Y.D., Dolganov,A.G., Sabadash,V.O.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Problems of micromechanical robotic systems

Ignatyev,M.B., Korshunov,A.V., Pyatishev,E.N.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Some aspect of MEMS technology

Pyatishev,E.N., Lurie,M.S., Popova,I.V.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Ferroelectric liquid crystal mixtures containing chiral ether and ester compounds with the 2-arylidene-p-menthan-3-one skeleton

Popova, E.V., Kutulya, L.A., Vashchenko, V.V., Pivnenko, M.N., Krivoshey, A.I., Fedoryako, A.P.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Finite element modeling edge effects in beam sandwich structures

Borovkov,A.I., Kiylo,O.L., Avdeev,I.V.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Complex nanostructured silicon wire

Klimovskaya, A.I., Lytvyn, P.M., Grigor'ev, N., Ostrovsky, I., Prokopenko, I.V., Kostyukevich, S.A.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12