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Estimation of the displacement threshold energies in Si and GaAs by means of ion sputtering of structures with thin marker layers

Author(s):
Kharlamov,V.S. ( A.F. Ioffe Physico-Technical Institute )
Ber,B.J.
Trushin,Yu.V.
Zhurkin,E.E.
Kovarski,A.P.
Schmidt,A.A.
1 more
Publication title:
Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4348
Pub. Year:
2000
Page(from):
275
Page(to):
281
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440372 [081944037X]
Language:
English
Call no.:
P63600/4348
Type:
Conference Proceedings

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