Blank Cover Image

Quadratic increase of nonlinear absorption in thin Al2O3 films at 193 nm

Author(s):
Publication title:
Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4347
Pub. Year:
2000
Page(from):
74
Page(to):
80
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440365 [0819440361]
Language:
English
Call no.:
P63600/4347
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Al2O3 coatings for 193 nm:a nonlinearly absorbing material

Apel,O., Mann,K.R.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Long-term test and characterization of optical components at 193 nm and 157 nm

Vogler,K., Klaft,I., Schroder,T., Stamm,U., Mann,K.R., Apel,O., Gorling,C., Leinhos,U.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Nonlinear absorption phenomena in oxide coatings for 193 nm

Apel,O., Mann,K.R., Heber,J., Thielsch,R.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings Characterization of absorption and scatter losses on optical components for ArF excimer lasers

Mann,K.R., Apel,O., Eva,E.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Characterizing absorption and total scattering losses on optical components for 193-nm wafer steppers

Mann,K.R., Apel,O., Eva,E.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Interfacial absorption of DUV coatings

Apel,O., Schulz-Grosser,M., Leinhos,U., Kennedy,M., Mann,K.R., Schuhmann,R.G.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Testing of optical components for microlithography at 193- and 157-nm

Mann,K.R., Apel,O., Eckert,G., Gorling,C., Leinhos,U., Schafer,B.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Nonlinear absorption phenomena in optical materials for the UV-spectral range

Eva,E., Mann,K.R.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Repetition rate dependence of two-photon absorption and self-trapped exciton luminescence in CaF2 at 193 nm

Goerling, C., Leinhos, U., Mann, K.R.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Comparative studies of absorptance behavior and laser-induced fluorescene of alkaline-earth fluorides at 193 and 157 nm

Goerling, Ch., Leinhos, U., Mann, K.R.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Scatter and absorption losses from DUV optics:a comparative study

Apel,O., Mann,K.R.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Absolute measurements of nonlinear absorption near LIDT at 193 nm

Blaschke,H., Ristau,D., Welsch,E., Apel,O.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12