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Ultranarrow-bandwidth 4-kHz ArF excimer laser for 193-nm lithography

Author(s):
Saito,T. ( Gigaphoton, Inc. )
Matsunaga,T.
Mitsuhashi,K.
Terashima,K.
Ohta,T.
Tada,A.
Ishihara,T.
Yoshino,M.
Tsushima,H.
Enami,T.
Tomaru,H.
Igarashi,T.
7 more
Publication title:
Optical Microlithography XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
Pub. Year:
2001
Vol.:
4346
Pt.:
Two of Two Parts
Page(from):
1229
Page(to):
1237
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440327 [0819440329]
Language:
English
Call no.:
P63600/4346
Type:
Conference Proceedings

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