Low-dielectric-constant FLARE 2.0 films as bottom antireflective coating layers for ArF lithography
- Author(s):
Chen,H.L. ( National Nano Device Lab. ) Cheng,H.C. Li,M.Y. Ko,F.H. Huang,T.Y. Chu,T.C. - Publication title:
- Optical Microlithography XIV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4346
- Pub. Year:
- 2001
- Vol.:
- 4346
- Pt.:
- Two of Two Parts
- Page(from):
- 1041
- Page(to):
- 1049
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440327 [0819440329]
- Language:
- English
- Call no.:
- P63600/4346
- Type:
- Conference Proceedings
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