Materials design and development of fluoropolymers for use as pellicles in 157-nm photolithography
- Author(s):
French,R.H. ( DuPont Co. ) Gordon,J.S. Jones,D.J. Lemon,M.F. Wheland,R.C. Zhang,E. Zumsteg Jr.,F.C. Sharp,K.G. Qiu,W. - Publication title:
- Optical Microlithography XIV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4346
- Pub. Year:
- 2001
- Vol.:
- 4346
- Pt.:
- One of Two Parts
- Page(from):
- 89
- Page(to):
- 97
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440327 [0819440329]
- Language:
- English
- Call no.:
- P63600/4346
- Type:
- Conference Proceedings
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