Control of line edge roughness of ultrathin resist films subjected to EUV exposure
- Author(s):
Ryoo,M. ( Association of Super-Advanced Electronics Technologies ) Shirayone,S. Oizumi,H. Matsuzawa,N.N. Irie,S. Yano,E. Okazaki,S. - Publication title:
- Advances in Resist Technology and Processing XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4345
- Pub. Year:
- 2001
- Vol.:
- 4345
- Pt.:
- Two of Two Parts
- Page(from):
- 903
- Page(to):
- 911
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440310 [0819440310]
- Language:
- English
- Call no.:
- P63600/4345
- Type:
- Conference Proceedings
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