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Characterization of thin and ultrathin polymer and resist films

Author(s):
Goldfarb,D.L. ( IBM Thomas J. Watson Research Ctr. )
Lin,Q.
Angelopoulos,M.
Soles,C.L.
Lin,E.K.
Wu,W.-L.
1 more
Publication title:
Advances in Resist Technology and Processing XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4345
Pub. Year:
2001
Vol.:
4345
Pt.:
One of Two Parts
Page(from):
335
Page(to):
343
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440310 [0819440310]
Language:
English
Call no.:
P63600/4345
Type:
Conference Proceedings

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