Wafer scale error induced by bottom antireflective coating
- Author(s):
- Kim,D.-S. ( Hyundai Electronics Industries Co., Ltd. )
- Jeong,J.-H.
- Nam,B.-H.
- Hwang,Y.J.
- Song,Y.J.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4344
- Pub. Year:
- 2001
- Page(from):
- 608
- Page(to):
- 615
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440303 [0819440302]
- Language:
- English
- Call no.:
- P63600/4344
- Type:
- Conference Proceedings
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