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Method for prevention of unopened contact hole in dual-damascene process

Author(s):
Lyu,G.-H. ( Samsung Electronics Co., Ltd. )
Kim,C.-H.
Lee,S.-J.
Yang,H.-H.
Lee,D.-Y.
Yoo,J.-Y.
Lee,J.-W.
Kim,Y.-H.
Nam,J.-L.
Han,W.-S.
5 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4344
Pub. Year:
2001
Page(from):
22
Page(to):
31
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440303 [0819440302]
Language:
English
Call no.:
P63600/4344
Type:
Conference Proceedings

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