Highly accurate CD control at stitching region for electron-beam projection lithography
- Author(s):
- Fujiwara,T. ( Nikon Corp. )
- Irita,T.
- Shimizu,S.
- Yamamoto,H.
- Suzuki,K.
- Publication title:
- Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4343
- Pub. Year:
- 2001
- Page(from):
- 727
- Page(to):
- 735
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819440297 [0819440299]
- Language:
- English
- Call no.:
- P63600/4343
- Type:
- Conference Proceedings
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