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Development of a high-average-power extreme-ultraviolet electric capillary discharge source

Author(s):
Fornaciari,N.R. ( Sandia National Labs. )
Bender,H.
Buchenauer,D.
Kanouff,M.P.
Karim,S.
Kubiak,G.D.
Moen,C.D.
Shimkaveg,G.M.
Silfvast,W.T.
Stewart,K.D.
5 more
Publication title:
Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4343
Pub. Year:
2001
Page(from):
226
Page(to):
231
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440297 [0819440299]
Language:
English
Call no.:
P63600/4343
Type:
Conference Proceedings

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