Performance improvement of rf MEMS capacitive switches with high-dielectric-constant materials

Performance improvement of rf MEMS capacitive switches with high-dielectric-constant materials

Author(s):

Yoon,H. ( The Pennsylvania State Univ. )

Publication title:

Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4334

Pub. Year:

2001

Page(from):

38

Page(to):

45

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819440204 [0819440205]

Language:

English

Call no.:

P63600/4334

Type:

Conference Proceedings

Details

TDL ID:	ZA00012050
Series ID:	PA00000029
Conf. info. (Name):	Smart structures and materials
Conf. info. (Number):	2001
Conf. info. (Venue):	Newport Beach, CA, USA
Conf. info. (Date):	2001.03.05-2001.03.07

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