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Active microvibration control of precision manufacturing factories with smart structure using piezoelectric actuators

Author(s):
Fujita,T. ( Univ. of Tokyo )
Enomoto,M.
Arikabe,T.
Ogawa,T.
Murai,N.
Hashimoto,Y.
Hamaguchi,H.
Kitahara,T.
3 more
Publication title:
Smart structures and materials 2001 : Smart systems for bridges, structures, and highways : 5-7 March 2001, Newport Beach, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4330
Pub. Year:
2001
Page(from):
449
Page(to):
459
Pages:
11
Pub. info.:
Bellingham: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440167 [0819440167]
Language:
English
Call no.:
P63600/4330
Type:
Conference Proceedings

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