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Pressure control of a piezoactuator-driven valve system

Author(s):
Publication title:
Smart structures and materials 2001 : Smart structures and integrated systems : 5-8 March, 2001, Newport Beach, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4327
Pub. Year:
2001
Page(from):
324
Page(to):
330
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819440136 [0819440132]
Language:
English
Call no.:
P63600/4327
Type:
Conference Proceedings

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