Materials processing technology for the integration of effective Ge p-i-n photodetectors on Si for Si microphotonics

Materials processing technology for the integration of effective Ge p-i-n photodetectors on Si for Si microphotonics

Author(s):

Luan,H.-C. ( Massachusetts Institute of Technology )

Publication title:

Silicon-based and Hybrid Optoelectronics III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4293

Pub. Year:

2001

Page(from):

118

Page(to):

122

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439710 [0819439711]

Language:

English

Call no.:

P63600/4293

Type:

Conference Proceedings

Details

TDL ID:	ZA00012009
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Silicon-based and hybrid optoelectronics
Conf. info. (Number):	2001 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2001.01.23-2001.01.24

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